Scientific Committee
| Philippe Bezard | imec, Leuven, Belgium |
| Jean-Paul Booth | CNRS – LPP, France |
| Thierry Chevolleau | CEA – Leti, Grenoble, France |
| Rémi Dussart | Université d’Orléans – GREMI, CNRS, France |
| Christian Dussarrat | Air Liquide, Japan |
| Evangelos Gogolides | NCSR, Demokritos, Greece |
| Michael Gordon | University of California, Santa Barbara, USA |
| Micha Haase | Fraunhofer ENAS, Chemnitz, Germany |
| Nafees A. Kabir | Intel, USA |
| Thorsten Lill | LAM Research, USA |
| Cedric Mannequin | CNRS – IMN, Nantes, France |
| Jean-Francois de Marneffe | imec, Leuven, Belgium |
| Marcel Melzer | University of Technology Chemnitz, Germany |
| Erwine Pargon | CNRS – LTM, Grenoble, France |
| Camille Petit-Etienne | CNRS – LTM, Grenoble, France |
| Patricia Pimenta Barros | CEA – Leti, Grenoble, France |
| Nicolas Posseme | CEA – Leti, Grenoble, France |
| Angélique Raley | Tokyo Electron America, USA |
| Danny Reuter | Fraunhofer ENAS, Chemnitz, Germany |
| Matthias Rudolph | Fraunhofer IPMS, Dresden, Germany |
Local Organizing Committee
Mareen Bunar
Eleonore Gebauer
Micha Haase
Mathias Lipowski
Marcel Melzer
Danny Reuter
Thorsten Thieme
Birgit Weber