PESM

2025

Plasma Etch And Strip In Microtechnology

Topics

  • Etching processes for semiconductors & memory applications
    • CMOS
    • 2D materials
    • Power electronics
    • Memory
    • LEDs
  • Etching processes for more than Moore applications
    • NEMS & MEMS
    • Photonics
    • Imagers
  • Etching for quantum applications
    • Ultralow damage etching of quantum materials
    • Etching of superconducting metals and nitrides
    • Plasma etching of diamond features
  • Emerging etching concepts and sustainable processing
    • ALE
    • New plasma sources
    • Heterogeneous/combined etch processes
    • Novel etch gases & chemistries
  • Plasma, vapor cleaning, isotropic etch concepts & conditioning
    • FIN recess
    • Stacked nanosheet fabrication
    • Cavity etch
    • MEMS/NEMS release
    • Surface cleaning and decontamination
    • Conditioning
  • process diagnostics, simulation and data analysis
    • Plasma / reactor diagnostics
    • Process and surface chemistry modelling
    • Artificial intelligence / machine learning