{"id":45,"date":"2025-01-15T10:31:07","date_gmt":"2025-01-15T09:31:07","guid":{"rendered":"https:\/\/pesm.memsfab.de\/2025\/?page_id=45"},"modified":"2026-01-23T21:29:57","modified_gmt":"2026-01-23T20:29:57","slug":"home-page","status":"publish","type":"page","link":"https:\/\/pesm.memsfab.de\/2025\/","title":{"rendered":"Workshop"},"content":{"rendered":"\n<div class=\"wp-block-cover alignfull is-light\" style=\"margin-top:0;padding-top:5vw;padding-right:5vw;padding-bottom:5vw;padding-left:5vw\"><span aria-hidden=\"true\" class=\"wp-block-cover__background has-accent-6-background-color has-background-dim-100 has-background-dim\"><\/span><div class=\"wp-block-cover__inner-container is-layout-flow wp-block-cover-is-layout-flow\">\n<div class=\"wp-block-group is-layout-flex wp-container-core-group-is-layout-3d951404 wp-block-group-is-layout-flex\">\n<div class=\"wp-block-group wp-container-content-8eb0bdf3 is-layout-flow wp-container-core-group-is-layout-2afb44c8 wp-block-group-is-layout-flow\">\n<p class=\"is-style-text-subtitle wp-container-content-aeb25491 is-style-text-subtitle--1 wp-block-paragraph\" style=\"font-style:normal;font-weight:300;letter-spacing:0px;line-height:1;text-decoration:none;text-transform:none\">Plasma Etch And Strip In Microtechnology<\/p>\n\n\n\n<div class=\"wp-block-buttons is-layout-flex wp-block-buttons-is-layout-flex\">\n<div class=\"wp-block-button is-style-fill\"><a class=\"wp-block-button__link has-accent-3-color has-base-background-color has-text-color has-background has-link-color wp-element-button\" href=\"https:\/\/pesm2026.inviteo.fr\/\" style=\"padding-top:var(--wp--preset--spacing--20);padding-right:var(--wp--preset--spacing--40);padding-bottom:var(--wp--preset--spacing--20);padding-left:var(--wp--preset--spacing--40)\"><strong>L<\/strong>earn More<\/a><\/div>\n<\/div>\n<\/div>\n\n\n\n<div class=\"wp-block-group wp-container-content-9cfa9a5a is-layout-flow wp-container-core-group-is-layout-7f9c660f wp-block-group-is-layout-flow\">\n<p class=\"has-text-align-right has-contrast-color has-text-color wp-block-paragraph\" style=\"font-size:clamp(57.838px, 3.615rem + ((1vw - 3.2px) * 6.094), 120px);font-style:normal;font-weight:700;letter-spacing:-4px;line-height:0.8;text-transform:uppercase\">PESM 2026<br>GRENOBLE<\/p>\n\n\n\n<p class=\"has-text-align-right has-white-color has-text-color wp-block-paragraph\" style=\"font-size:clamp(57.838px, 3.615rem + ((1vw - 3.2px) * 6.094), 120px);font-style:normal;font-weight:700;letter-spacing:-4px;line-height:0.8;text-transform:uppercase\">08\/06 &#8211; 09\/06<\/p>\n<\/div>\n<\/div>\n<\/div><\/div>\n\n\n\n<h2 class=\"wp-block-heading\">Our Sponsors<\/h2>\n\n\n\t\n\t\t<div id=\"gs_logo_area_1\" class=\"gs_logo_area gs_logo_area_1 slider1\" style=\"opacity: 0; visibility: hidden;\">\n\t\t\t<div class=\"gs_logo_area--inner\">\n\t\n\t\t\t\t\n<div class=\"gs_logo_container gs_carousel_swiper gs_logo_fix_height_and_center\" data-carousel-config='{\"direction\":\"horizontal\",\"speed\":500,\"isAutoplay\":true,\"autoplayDelay\":2000,\"loop\":true,\"pauseOnHover\":true,\"ticker\":false,\"navs\":false,\"navs_pos\":\"bottom\",\"dots\":true,\"dynamic_dots\":true,\"slideSpace\":10,\"slidesPerGroup\":1,\"desktopLogos\":3,\"tabletLogos\":3,\"mobileLogos\":2,\"reverseDirection\":false}'>\n\n\t\n\t\t\n\t\t\t<div class=\"gs_logo_single--wrapper\">\n\t\t\t\t<div class=\"gs_logo_single\">\n\n\t\t\t\t\t<!-- Logo Img -->\n\t\t\t\t\t<img loading=\"lazy\" decoding=\"async\" width=\"300\" height=\"77\" src=\"https:\/\/pesm.memsfab.de\/2025\/wp-content\/uploads\/2025\/06\/PTI-Alternative-Logo-300-resolution-300x77.jpg\" class=\"default  gs-logo--img wp-post-image\" alt=\"\" title=\"PlasmaTherm\" srcset=\"https:\/\/pesm.memsfab.de\/2025\/wp-content\/uploads\/2025\/06\/PTI-Alternative-Logo-300-resolution-300x77.jpg 300w, https:\/\/pesm.memsfab.de\/2025\/wp-content\/uploads\/2025\/06\/PTI-Alternative-Logo-300-resolution-1024x261.jpg 1024w, https:\/\/pesm.memsfab.de\/2025\/wp-content\/uploads\/2025\/06\/PTI-Alternative-Logo-300-resolution-768x196.jpg 768w, https:\/\/pesm.memsfab.de\/2025\/wp-content\/uploads\/2025\/06\/PTI-Alternative-Logo-300-resolution.jpg 1050w\" sizes=\"auto, (max-width: 300px) 100vw, 300px\" \/>\n\t\t\t\t\t<!-- Logo Title -->\n\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t<!-- Logo Category -->\n\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t<\/div>\n\t\t\t<\/div>\n\n\t\t\n\t\t\t<div class=\"gs_logo_single--wrapper\">\n\t\t\t\t<div class=\"gs_logo_single\">\n\n\t\t\t\t\t<!-- Logo Img -->\n\t\t\t\t\t<img loading=\"lazy\" decoding=\"async\" width=\"300\" height=\"125\" src=\"https:\/\/pesm.memsfab.de\/2025\/wp-content\/uploads\/2025\/06\/Logo-scia-Systems_RGB-300x125.png\" class=\"default  gs-logo--img wp-post-image\" alt=\"\" title=\"SCIA\" srcset=\"https:\/\/pesm.memsfab.de\/2025\/wp-content\/uploads\/2025\/06\/Logo-scia-Systems_RGB-300x125.png 300w, https:\/\/pesm.memsfab.de\/2025\/wp-content\/uploads\/2025\/06\/Logo-scia-Systems_RGB.png 510w\" sizes=\"auto, (max-width: 300px) 100vw, 300px\" \/>\n\t\t\t\t\t<!-- Logo Title -->\n\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t<!-- Logo Category -->\n\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t<\/div>\n\t\t\t<\/div>\n\n\t\t\n\t\t\t<div class=\"gs_logo_single--wrapper\">\n\t\t\t\t<div class=\"gs_logo_single\">\n\n\t\t\t\t\t<!-- Logo Img -->\n\t\t\t\t\t<img loading=\"lazy\" decoding=\"async\" width=\"300\" height=\"72\" src=\"https:\/\/pesm.memsfab.de\/2025\/wp-content\/uploads\/2025\/06\/memsstar-logo-300x72.jpg\" class=\"default  gs-logo--img wp-post-image\" alt=\"\" title=\"memsstar\" srcset=\"https:\/\/pesm.memsfab.de\/2025\/wp-content\/uploads\/2025\/06\/memsstar-logo-300x72.jpg 300w, https:\/\/pesm.memsfab.de\/2025\/wp-content\/uploads\/2025\/06\/memsstar-logo-1024x246.jpg 1024w, https:\/\/pesm.memsfab.de\/2025\/wp-content\/uploads\/2025\/06\/memsstar-logo-768x184.jpg 768w, https:\/\/pesm.memsfab.de\/2025\/wp-content\/uploads\/2025\/06\/memsstar-logo.jpg 1417w\" sizes=\"auto, (max-width: 300px) 100vw, 300px\" \/>\n\t\t\t\t\t<!-- Logo Title -->\n\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t<!-- Logo Category -->\n\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t<\/div>\n\t\t\t<\/div>\n\n\t\t\n\t\t\t<div class=\"gs_logo_single--wrapper\">\n\t\t\t\t<div class=\"gs_logo_single\">\n\n\t\t\t\t\t<!-- Logo Img -->\n\t\t\t\t\t<img loading=\"lazy\" decoding=\"async\" width=\"300\" height=\"59\" src=\"https:\/\/pesm.memsfab.de\/2025\/wp-content\/uploads\/2025\/06\/GF_logo_horz_cmyk_R-1-300x59.png\" class=\"default  gs-logo--img wp-post-image\" alt=\"\" title=\"GlobalFoundries\" srcset=\"https:\/\/pesm.memsfab.de\/2025\/wp-content\/uploads\/2025\/06\/GF_logo_horz_cmyk_R-1-300x59.png 300w, https:\/\/pesm.memsfab.de\/2025\/wp-content\/uploads\/2025\/06\/GF_logo_horz_cmyk_R-1-1024x200.png 1024w, https:\/\/pesm.memsfab.de\/2025\/wp-content\/uploads\/2025\/06\/GF_logo_horz_cmyk_R-1-768x150.png 768w, https:\/\/pesm.memsfab.de\/2025\/wp-content\/uploads\/2025\/06\/GF_logo_horz_cmyk_R-1.png 1147w\" sizes=\"auto, (max-width: 300px) 100vw, 300px\" \/>\n\t\t\t\t\t<!-- Logo Title -->\n\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t<!-- Logo Category -->\n\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t<\/div>\n\t\t\t<\/div>\n\n\t\t\n\t\t\t<div class=\"gs_logo_single--wrapper\">\n\t\t\t\t<div class=\"gs_logo_single\">\n\n\t\t\t\t\t<!-- Logo Img -->\n\t\t\t\t\t<img loading=\"lazy\" decoding=\"async\" width=\"300\" height=\"214\" src=\"https:\/\/pesm.memsfab.de\/2025\/wp-content\/uploads\/2025\/06\/TEL_name_V_withoutTM_rgb_Large-300x214.png\" class=\"default  gs-logo--img wp-post-image\" alt=\"\" title=\"TEL\" \/>\n\t\t\t\t\t<!-- Logo Title -->\n\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t<!-- Logo Category -->\n\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t<\/div>\n\t\t\t<\/div>\n\n\t\t\n\t\t\t<div class=\"gs_logo_single--wrapper\">\n\t\t\t\t<div class=\"gs_logo_single\">\n\n\t\t\t\t\t<!-- Logo Img -->\n\t\t\t\t\t<img loading=\"lazy\" decoding=\"async\" width=\"300\" height=\"99\" src=\"https:\/\/pesm.memsfab.de\/2025\/wp-content\/uploads\/2025\/06\/SENTECH-Logo-1280-x-422_RGB-300x99.png\" class=\"default  gs-logo--img wp-post-image\" alt=\"\" title=\"SenTech\" srcset=\"https:\/\/pesm.memsfab.de\/2025\/wp-content\/uploads\/2025\/06\/SENTECH-Logo-1280-x-422_RGB-300x99.png 300w, https:\/\/pesm.memsfab.de\/2025\/wp-content\/uploads\/2025\/06\/SENTECH-Logo-1280-x-422_RGB-1024x338.png 1024w, https:\/\/pesm.memsfab.de\/2025\/wp-content\/uploads\/2025\/06\/SENTECH-Logo-1280-x-422_RGB-768x253.png 768w, https:\/\/pesm.memsfab.de\/2025\/wp-content\/uploads\/2025\/06\/SENTECH-Logo-1280-x-422_RGB.png 1280w\" sizes=\"auto, (max-width: 300px) 100vw, 300px\" \/>\n\t\t\t\t\t<!-- Logo Title -->\n\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t<!-- Logo Category -->\n\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t<\/div>\n\t\t\t<\/div>\n\n\t\t\n\t\t\t<div class=\"gs_logo_single--wrapper\">\n\t\t\t\t<div class=\"gs_logo_single\">\n\n\t\t\t\t\t<!-- Logo Img -->\n\t\t\t\t\t<img loading=\"lazy\" decoding=\"async\" width=\"300\" height=\"85\" src=\"https:\/\/pesm.memsfab.de\/2025\/wp-content\/uploads\/2025\/06\/FH_ENAS_Logo_Web-1536x436-1-300x85.png\" class=\"default  gs-logo--img wp-post-image\" alt=\"\" title=\"Fraunhofer ENAS\" srcset=\"https:\/\/pesm.memsfab.de\/2025\/wp-content\/uploads\/2025\/06\/FH_ENAS_Logo_Web-1536x436-1-300x85.png 300w, https:\/\/pesm.memsfab.de\/2025\/wp-content\/uploads\/2025\/06\/FH_ENAS_Logo_Web-1536x436-1-1024x291.png 1024w, https:\/\/pesm.memsfab.de\/2025\/wp-content\/uploads\/2025\/06\/FH_ENAS_Logo_Web-1536x436-1-768x218.png 768w, https:\/\/pesm.memsfab.de\/2025\/wp-content\/uploads\/2025\/06\/FH_ENAS_Logo_Web-1536x436-1.png 1536w\" sizes=\"auto, (max-width: 300px) 100vw, 300px\" \/>\n\t\t\t\t\t<!-- Logo Title -->\n\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t<!-- Logo Category -->\n\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t<\/div>\n\t\t\t<\/div>\n\n\t\t\n\t\t\t<div class=\"gs_logo_single--wrapper\">\n\t\t\t\t<div class=\"gs_logo_single\">\n\n\t\t\t\t\t<!-- Logo Img -->\n\t\t\t\t\t<img loading=\"lazy\" decoding=\"async\" width=\"300\" height=\"132\" src=\"https:\/\/pesm.memsfab.de\/2025\/wp-content\/uploads\/2025\/06\/Lam_Research_logo_midnight-300x132.jpg\" class=\"default  gs-logo--img wp-post-image\" alt=\"\" title=\"Lam\" srcset=\"https:\/\/pesm.memsfab.de\/2025\/wp-content\/uploads\/2025\/06\/Lam_Research_logo_midnight-300x132.jpg 300w, https:\/\/pesm.memsfab.de\/2025\/wp-content\/uploads\/2025\/06\/Lam_Research_logo_midnight.jpg 612w\" sizes=\"auto, (max-width: 300px) 100vw, 300px\" \/>\n\t\t\t\t\t<!-- Logo Title -->\n\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t<!-- Logo Category -->\n\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t<\/div>\n\t\t\t<\/div>\n\n\t\t\n\t\t\t<div class=\"gs_logo_single--wrapper\">\n\t\t\t\t<div class=\"gs_logo_single\">\n\n\t\t\t\t\t<!-- Logo Img -->\n\t\t\t\t\t<img loading=\"lazy\" decoding=\"async\" width=\"300\" height=\"135\" src=\"https:\/\/pesm.memsfab.de\/2025\/wp-content\/uploads\/2025\/06\/Bosch_symbol_logo_black_red_DE-300x135.png\" class=\"default  gs-logo--img wp-post-image\" alt=\"\" title=\"Bosch\" srcset=\"https:\/\/pesm.memsfab.de\/2025\/wp-content\/uploads\/2025\/06\/Bosch_symbol_logo_black_red_DE-300x135.png 300w, https:\/\/pesm.memsfab.de\/2025\/wp-content\/uploads\/2025\/06\/Bosch_symbol_logo_black_red_DE-1024x462.png 1024w, https:\/\/pesm.memsfab.de\/2025\/wp-content\/uploads\/2025\/06\/Bosch_symbol_logo_black_red_DE-768x346.png 768w, https:\/\/pesm.memsfab.de\/2025\/wp-content\/uploads\/2025\/06\/Bosch_symbol_logo_black_red_DE-1536x693.png 1536w, https:\/\/pesm.memsfab.de\/2025\/wp-content\/uploads\/2025\/06\/Bosch_symbol_logo_black_red_DE.png 1920w\" sizes=\"auto, (max-width: 300px) 100vw, 300px\" \/>\n\t\t\t\t\t<!-- Logo Title -->\n\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t<!-- Logo Category -->\n\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t<\/div>\n\t\t\t<\/div>\n\n\t\t\n\t\t\t<div class=\"gs_logo_single--wrapper\">\n\t\t\t\t<div class=\"gs_logo_single\">\n\n\t\t\t\t\t<!-- Logo Img -->\n\t\t\t\t\t<img loading=\"lazy\" decoding=\"async\" width=\"300\" height=\"62\" src=\"https:\/\/pesm.memsfab.de\/2025\/wp-content\/uploads\/2025\/06\/Trymax-Logo-CMYK-drukwerk-300x62.jpg\" class=\"default  gs-logo--img wp-post-image\" alt=\"\" title=\"Trymax\" srcset=\"https:\/\/pesm.memsfab.de\/2025\/wp-content\/uploads\/2025\/06\/Trymax-Logo-CMYK-drukwerk-300x62.jpg 300w, https:\/\/pesm.memsfab.de\/2025\/wp-content\/uploads\/2025\/06\/Trymax-Logo-CMYK-drukwerk-1024x212.jpg 1024w, https:\/\/pesm.memsfab.de\/2025\/wp-content\/uploads\/2025\/06\/Trymax-Logo-CMYK-drukwerk-768x159.jpg 768w, https:\/\/pesm.memsfab.de\/2025\/wp-content\/uploads\/2025\/06\/Trymax-Logo-CMYK-drukwerk-1536x318.jpg 1536w, https:\/\/pesm.memsfab.de\/2025\/wp-content\/uploads\/2025\/06\/Trymax-Logo-CMYK-drukwerk.jpg 1673w\" sizes=\"auto, (max-width: 300px) 100vw, 300px\" \/>\n\t\t\t\t\t<!-- Logo Title -->\n\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t<!-- Logo Category -->\n\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t<\/div>\n\t\t\t<\/div>\n\n\t\t\n\t\t\t<div class=\"gs_logo_single--wrapper\">\n\t\t\t\t<div class=\"gs_logo_single\">\n\n\t\t\t\t\t<!-- Logo Img -->\n\t\t\t\t\t<img loading=\"lazy\" decoding=\"async\" width=\"258\" height=\"72\" src=\"https:\/\/pesm.memsfab.de\/2025\/wp-content\/uploads\/2025\/06\/ipms.png\" class=\"default  gs-logo--img wp-post-image\" alt=\"\" title=\"Fraunhofer IPMS\" \/>\n\t\t\t\t\t<!-- Logo Title -->\n\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t<!-- Logo Category -->\n\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t<\/div>\n\t\t\t<\/div>\n\n\t\t\t\t\n\t\n<\/div>\t\t\t<\/div>\n\t\t<\/div>\n\t\n\t\t<style>#gs_logo_area_1:not(.verticaltickerdown):not(.verticalticker) .gs_logo_container{margin-left:-5px}#gs_logo_area_1:not(.verticaltickerdown):not(.verticalticker) .gs_logo_container{margin-right:-5px}#gs_logo_area_1:not(.verticaltickerdown):not(.verticalticker) .gs_logo_single--wrapper{padding:5px}#gs_logo_area_1 ul.gs-logo-filter-cats{text-align:center!important}#gs_logo_area_1 .gs_logo_single--wrapper{width:33.333333333333%}@media (max-width:1023px){#gs_logo_area_1 .gs_logo_single--wrapper{width:33.333333333333%}}@media (max-width:767px){#gs_logo_area_1 .gs_logo_single--wrapper{width:50%}}<\/style>\n\n\n<h2 class=\"wp-block-heading\">Scope of the Workshop<\/h2>\n\n\n\n<p class=\"wp-block-paragraph\">PESM 2025 is the 15th event in a series devoted to plasma etch and strip processes for micro-, nano-, and bio-technologies. This meeting will be held on June 16\u201317, 2025 (Monday &amp; Tuesday) in Chemnitz, Germany.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">This workshop provides a forum for open discussions between science and technology, targeting not only scientists, process engineers, and Ph.D. students but also industrial partners in the field of dry etching, including plasma processing and other vacuum-based removal techniques such as ion beam, neutral beam, and gaseous thermal etching.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">PESM 2025 will focus on plasma etching and cleaning challenge for semiconductors &amp; memory applications, for More-than-Moore applications and for quantum applications. Additionally, there are dedicated sessions on vapor cleaning, isotropic etch concepts &amp; conditioning, as well as process diagnostics, modeling, and data Analysis. To stimulate technical discussions, invited talks will be presented by scientific and technical leaders of the etch community in each of the key areas defined above.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">If you have any questions or if we can assist you with any issues, please feel free to contact the organizing committee directly via email at <a href=\"mailto:pesm2025@memsfab.de\">pesm2025@memsfab.de<\/a>.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">Key Dates<\/h2>\n\n\n\n<div class=\"wp-block-columns is-layout-flex wp-container-core-columns-is-layout-794e3cfa wp-block-columns-is-layout-flex\">\n<div class=\"wp-block-column is-style-default has-base-color has-accent-1-background-color has-text-color has-background has-link-color wp-elements-1 is-layout-flow wp-block-column-is-layout-flow\" style=\"border-radius:10px;padding-top:var(--wp--preset--spacing--30);padding-right:var(--wp--preset--spacing--30);padding-bottom:var(--wp--preset--spacing--30);padding-left:var(--wp--preset--spacing--30)\">\n<div class=\"wp-block-group is-vertical is-content-justification-center is-layout-flex wp-container-core-group-is-layout-bc18b00a wp-block-group-is-layout-flex\">\n<p class=\"has-text-align-center is-style-text-subtitle is-style-text-subtitle--2 wp-block-paragraph\" style=\"font-style:normal;font-weight:800;text-transform:none\">January 20<sup>th<\/sup><br>2025<\/p>\n\n\n\n<p class=\"has-text-align-center is-style-default wp-block-paragraph\" style=\"text-transform:none\">Opening for Submission<\/p>\n<\/div>\n<\/div>\n\n\n\n<div class=\"wp-block-column is-style-default has-base-color has-accent-1-background-color has-text-color has-background has-link-color wp-elements-2 is-layout-flow wp-block-column-is-layout-flow\" style=\"border-radius:10px;padding-top:var(--wp--preset--spacing--30);padding-right:var(--wp--preset--spacing--30);padding-bottom:var(--wp--preset--spacing--30);padding-left:var(--wp--preset--spacing--30)\">\n<div class=\"wp-block-group is-vertical is-content-justification-center is-layout-flex wp-container-core-group-is-layout-bc18b00a wp-block-group-is-layout-flex\">\n<p class=\"has-text-align-center is-style-text-subtitle is-style-text-subtitle--3 wp-block-paragraph\" style=\"font-style:normal;font-weight:800;text-transform:none\">March 17<sup>th<\/sup><br>2025<\/p>\n\n\n\n<p class=\"has-text-align-center is-style-default wp-block-paragraph\" style=\"text-transform:none\">Abstract due<\/p>\n<\/div>\n<\/div>\n\n\n\n<div class=\"wp-block-column is-style-default has-base-color has-accent-1-background-color has-text-color has-background has-link-color wp-elements-3 is-layout-flow wp-block-column-is-layout-flow\" style=\"border-radius:10px;padding-top:var(--wp--preset--spacing--30);padding-right:var(--wp--preset--spacing--30);padding-bottom:var(--wp--preset--spacing--30);padding-left:var(--wp--preset--spacing--30)\">\n<div class=\"wp-block-group is-vertical is-content-justification-center is-layout-flex wp-container-core-group-is-layout-bc18b00a wp-block-group-is-layout-flex\">\n<p class=\"has-text-align-center is-style-text-subtitle is-style-text-subtitle--4 wp-block-paragraph\" style=\"font-style:normal;font-weight:800;text-transform:none\">March 31<sup>th<\/sup><br>2025<\/p>\n\n\n\n<p class=\"has-text-align-center is-style-default wp-block-paragraph\" style=\"text-transform:none\">Notification of Authors<\/p>\n<\/div>\n<\/div>\n<\/div>\n\n\n\n<div class=\"wp-block-columns is-layout-flex wp-container-core-columns-is-layout-794e3cfa wp-block-columns-is-layout-flex\">\n<div class=\"wp-block-column is-style-default has-base-color has-accent-1-background-color has-text-color has-background has-link-color wp-elements-4 is-layout-flow wp-block-column-is-layout-flow\" style=\"border-radius:10px;padding-top:var(--wp--preset--spacing--30);padding-right:var(--wp--preset--spacing--30);padding-bottom:var(--wp--preset--spacing--30);padding-left:var(--wp--preset--spacing--30)\">\n<div class=\"wp-block-group is-vertical is-content-justification-center is-layout-flex wp-container-core-group-is-layout-bc18b00a wp-block-group-is-layout-flex\">\n<p class=\"has-text-align-center is-style-text-subtitle is-style-text-subtitle--5 wp-block-paragraph\" style=\"font-style:normal;font-weight:800;text-transform:none\">May 5<sup>th<\/sup><br>2025<\/p>\n\n\n\n<p class=\"has-text-align-center is-style-default wp-block-paragraph\" style=\"text-transform:none\">Early Bird Registration Fee until<\/p>\n<\/div>\n<\/div>\n\n\n\n<div class=\"wp-block-column is-style-default has-base-color has-accent-1-background-color has-text-color has-background has-link-color wp-elements-5 is-layout-flow wp-block-column-is-layout-flow\" style=\"border-radius:10px;padding-top:var(--wp--preset--spacing--30);padding-right:var(--wp--preset--spacing--30);padding-bottom:var(--wp--preset--spacing--30);padding-left:var(--wp--preset--spacing--30)\">\n<div class=\"wp-block-group is-vertical is-content-justification-center is-layout-flex wp-container-core-group-is-layout-bc18b00a wp-block-group-is-layout-flex\">\n<p class=\"has-text-align-center is-style-text-subtitle is-style-text-subtitle--6 wp-block-paragraph\" style=\"font-style:normal;font-weight:800;text-transform:none\">June 16<sup>th<\/sup><br>June 17<sup>th<\/sup><br>2025<\/p>\n\n\n\n<p class=\"has-text-align-center is-style-default wp-block-paragraph\" style=\"text-transform:none\">Conference<\/p>\n<\/div>\n<\/div>\n\n\n\n<div class=\"wp-block-column is-style-default has-base-color has-text-color has-link-color wp-elements-6 is-layout-flow wp-block-column-is-layout-flow\" style=\"border-radius:10px;padding-top:var(--wp--preset--spacing--30);padding-right:var(--wp--preset--spacing--30);padding-bottom:var(--wp--preset--spacing--30);padding-left:var(--wp--preset--spacing--30)\"><\/div>\n<\/div>\n\n\n\n<p class=\"wp-block-paragraph\"><\/p>\n","protected":false},"excerpt":{"rendered":"<p>Our Sponsors Scope of the Workshop PESM 2025 is the 15th event in a series devoted to plasma etch and strip processes for micro-, nano-, and bio-technologies. This meeting will be held on June 16\u201317, 2025 (Monday &amp; Tuesday) in Chemnitz, Germany. This workshop provides a forum for open discussions between science and technology, targeting [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":0,"parent":0,"menu_order":0,"comment_status":"closed","ping_status":"closed","template":"","meta":{"footnotes":""},"class_list":["post-45","page","type-page","status-publish","hentry"],"yoast_head":"<!-- This site is optimized with the Yoast SEO plugin v28.6 - https:\/\/yoast.com\/product\/yoast-seo-wordpress\/ -->\n<title>Workshop - PESM 2025<\/title>\n<meta name=\"robots\" content=\"index, follow, max-snippet:-1, max-image-preview:large, max-video-preview:-1\" \/>\n<link rel=\"canonical\" href=\"https:\/\/pesm.memsfab.de\/2025\/\" \/>\n<meta property=\"og:locale\" content=\"de_DE\" \/>\n<meta property=\"og:type\" content=\"article\" \/>\n<meta property=\"og:title\" content=\"Workshop - PESM 2025\" \/>\n<meta property=\"og:description\" content=\"Our Sponsors Scope of the Workshop PESM 2025 is the 15th event in a series devoted to plasma etch and strip processes for micro-, nano-, and bio-technologies. This meeting will be held on June 16\u201317, 2025 (Monday &amp; Tuesday) in Chemnitz, Germany. This workshop provides a forum for open discussions between science and technology, targeting [&hellip;]\" \/>\n<meta property=\"og:url\" content=\"https:\/\/pesm.memsfab.de\/2025\/\" \/>\n<meta property=\"og:site_name\" content=\"PESM 2025\" \/>\n<meta property=\"article:modified_time\" content=\"2026-01-23T20:29:57+00:00\" \/>\n<meta name=\"twitter:card\" content=\"summary_large_image\" \/>\n<meta name=\"twitter:label1\" content=\"Gesch\u00e4tzte Lesezeit\" \/>\n\t<meta name=\"twitter:data1\" content=\"2\u00a0Minuten\" \/>\n<script type=\"application\/ld+json\" class=\"yoast-schema-graph\">{\"@context\":\"https:\\\/\\\/schema.org\",\"@graph\":[{\"@type\":\"WebPage\",\"@id\":\"https:\\\/\\\/pesm.memsfab.de\\\/2025\\\/\",\"url\":\"https:\\\/\\\/pesm.memsfab.de\\\/2025\\\/\",\"name\":\"Workshop - PESM 2025\",\"isPartOf\":{\"@id\":\"https:\\\/\\\/pesm.memsfab.de\\\/2025\\\/#website\"},\"datePublished\":\"2025-01-15T09:31:07+00:00\",\"dateModified\":\"2026-01-23T20:29:57+00:00\",\"breadcrumb\":{\"@id\":\"https:\\\/\\\/pesm.memsfab.de\\\/2025\\\/#breadcrumb\"},\"inLanguage\":\"de\",\"potentialAction\":[{\"@type\":\"ReadAction\",\"target\":[\"https:\\\/\\\/pesm.memsfab.de\\\/2025\\\/\"]}]},{\"@type\":\"BreadcrumbList\",\"@id\":\"https:\\\/\\\/pesm.memsfab.de\\\/2025\\\/#breadcrumb\",\"itemListElement\":[{\"@type\":\"ListItem\",\"position\":1,\"name\":\"Startseite\",\"item\":\"https:\\\/\\\/pesm.memsfab.de\\\/2025\\\/\"},{\"@type\":\"ListItem\",\"position\":2,\"name\":\"Workshop\"}]},{\"@type\":\"WebSite\",\"@id\":\"https:\\\/\\\/pesm.memsfab.de\\\/2025\\\/#website\",\"url\":\"https:\\\/\\\/pesm.memsfab.de\\\/2025\\\/\",\"name\":\"PESM 2025\",\"description\":\"Plasma Etch And Strip In Microtechnology\",\"potentialAction\":[{\"@type\":\"SearchAction\",\"target\":{\"@type\":\"EntryPoint\",\"urlTemplate\":\"https:\\\/\\\/pesm.memsfab.de\\\/2025\\\/?s={search_term_string}\"},\"query-input\":{\"@type\":\"PropertyValueSpecification\",\"valueRequired\":true,\"valueName\":\"search_term_string\"}}],\"inLanguage\":\"de\"}]}<\/script>\n<!-- \/ Yoast SEO plugin. -->","yoast_head_json":{"title":"Workshop - PESM 2025","robots":{"index":"index","follow":"follow","max-snippet":"max-snippet:-1","max-image-preview":"max-image-preview:large","max-video-preview":"max-video-preview:-1"},"canonical":"https:\/\/pesm.memsfab.de\/2025\/","og_locale":"de_DE","og_type":"article","og_title":"Workshop - PESM 2025","og_description":"Our Sponsors Scope of the Workshop PESM 2025 is the 15th event in a series devoted to plasma etch and strip processes for micro-, nano-, and bio-technologies. This meeting will be held on June 16\u201317, 2025 (Monday &amp; Tuesday) in Chemnitz, Germany. This workshop provides a forum for open discussions between science and technology, targeting [&hellip;]","og_url":"https:\/\/pesm.memsfab.de\/2025\/","og_site_name":"PESM 2025","article_modified_time":"2026-01-23T20:29:57+00:00","twitter_card":"summary_large_image","twitter_misc":{"Gesch\u00e4tzte Lesezeit":"2\u00a0Minuten"},"schema":{"@context":"https:\/\/schema.org","@graph":[{"@type":"WebPage","@id":"https:\/\/pesm.memsfab.de\/2025\/","url":"https:\/\/pesm.memsfab.de\/2025\/","name":"Workshop - PESM 2025","isPartOf":{"@id":"https:\/\/pesm.memsfab.de\/2025\/#website"},"datePublished":"2025-01-15T09:31:07+00:00","dateModified":"2026-01-23T20:29:57+00:00","breadcrumb":{"@id":"https:\/\/pesm.memsfab.de\/2025\/#breadcrumb"},"inLanguage":"de","potentialAction":[{"@type":"ReadAction","target":["https:\/\/pesm.memsfab.de\/2025\/"]}]},{"@type":"BreadcrumbList","@id":"https:\/\/pesm.memsfab.de\/2025\/#breadcrumb","itemListElement":[{"@type":"ListItem","position":1,"name":"Startseite","item":"https:\/\/pesm.memsfab.de\/2025\/"},{"@type":"ListItem","position":2,"name":"Workshop"}]},{"@type":"WebSite","@id":"https:\/\/pesm.memsfab.de\/2025\/#website","url":"https:\/\/pesm.memsfab.de\/2025\/","name":"PESM 2025","description":"Plasma Etch And Strip In Microtechnology","potentialAction":[{"@type":"SearchAction","target":{"@type":"EntryPoint","urlTemplate":"https:\/\/pesm.memsfab.de\/2025\/?s={search_term_string}"},"query-input":{"@type":"PropertyValueSpecification","valueRequired":true,"valueName":"search_term_string"}}],"inLanguage":"de"}]}},"_links":{"self":[{"href":"https:\/\/pesm.memsfab.de\/2025\/wp-json\/wp\/v2\/pages\/45","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/pesm.memsfab.de\/2025\/wp-json\/wp\/v2\/pages"}],"about":[{"href":"https:\/\/pesm.memsfab.de\/2025\/wp-json\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"https:\/\/pesm.memsfab.de\/2025\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/pesm.memsfab.de\/2025\/wp-json\/wp\/v2\/comments?post=45"}],"version-history":[{"count":23,"href":"https:\/\/pesm.memsfab.de\/2025\/wp-json\/wp\/v2\/pages\/45\/revisions"}],"predecessor-version":[{"id":348,"href":"https:\/\/pesm.memsfab.de\/2025\/wp-json\/wp\/v2\/pages\/45\/revisions\/348"}],"wp:attachment":[{"href":"https:\/\/pesm.memsfab.de\/2025\/wp-json\/wp\/v2\/media?parent=45"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}