{"id":8,"date":"2025-01-15T09:49:06","date_gmt":"2025-01-15T08:49:06","guid":{"rendered":"https:\/\/pesm.memsfab.de\/2025\/?page_id=8"},"modified":"2025-01-15T09:49:06","modified_gmt":"2025-01-15T08:49:06","slug":"topics","status":"publish","type":"page","link":"https:\/\/pesm.memsfab.de\/2025\/topics\/","title":{"rendered":"Topics"},"content":{"rendered":"\n<ul class=\"wp-block-list\">\n<li>Etching processes for semiconductors &amp; memory applications\n<ul class=\"wp-block-list\">\n<li>CMOS<\/li>\n\n\n\n<li>2D materials<\/li>\n\n\n\n<li>Power electronics<\/li>\n\n\n\n<li>Memory<\/li>\n\n\n\n<li>LEDs<\/li>\n<\/ul>\n<\/li>\n\n\n\n<li>Etching processes for more than Moore applications\n<ul class=\"wp-block-list\">\n<li>NEMS &amp; MEMS<\/li>\n\n\n\n<li>Photonics<\/li>\n\n\n\n<li>Imagers<\/li>\n<\/ul>\n<\/li>\n\n\n\n<li>Etching for quantum applications\n<ul class=\"wp-block-list\">\n<li>Ultralow damage etching of quantum materials<\/li>\n\n\n\n<li>Etching of superconducting metals and nitrides<\/li>\n\n\n\n<li>Plasma etching of diamond features<\/li>\n<\/ul>\n<\/li>\n\n\n\n<li>Emerging etching concepts and sustainable processing\n<ul class=\"wp-block-list\">\n<li>ALE<\/li>\n\n\n\n<li>New plasma sources<\/li>\n\n\n\n<li>Heterogeneous\/combined etch processes<\/li>\n\n\n\n<li>Novel etch gases &amp; chemistries<\/li>\n<\/ul>\n<\/li>\n\n\n\n<li>Plasma, vapor cleaning, isotropic etch concepts &amp; conditioning\n<ul class=\"wp-block-list\">\n<li>FIN recess<\/li>\n\n\n\n<li>Stacked nanosheet fabrication<\/li>\n\n\n\n<li>Cavity etch<\/li>\n\n\n\n<li>MEMS\/NEMS release<\/li>\n\n\n\n<li>Surface cleaning and decontamination<\/li>\n\n\n\n<li>Conditioning<\/li>\n<\/ul>\n<\/li>\n\n\n\n<li>process diagnostics, simulation and data analysis\n<ul class=\"wp-block-list\">\n<li>Plasma \/ reactor diagnostics<\/li>\n\n\n\n<li>Process and surface chemistry modelling<\/li>\n\n\n\n<li>Artificial intelligence \/ machine learning<\/li>\n<\/ul>\n<\/li>\n<\/ul>\n","protected":false},"excerpt":{"rendered":"","protected":false},"author":1,"featured_media":0,"parent":0,"menu_order":0,"comment_status":"closed","ping_status":"closed","template":"","meta":{"footnotes":""},"class_list":["post-8","page","type-page","status-publish","hentry"],"yoast_head":"<!-- This site is optimized with the Yoast SEO plugin v27.4 - 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